PI miCos presents the smallest linear positioning stage of the Q-Motion series: The Q-521 is only 21 mm wide and is equipped with an integrated high-resolution linear encoder.
The new miniature stage now achieves a step size of up to 2 nm and a repeatability of up to 25 nm over the entire travel range. The Q-521 is available for travel ranges of 12 mm, 22 mm and 32 mm.
Position measurement is performed selectively by an incremental optical encoder with 1 nm resolution or with 4 nm resolution. Open-loop versions of the linear positioning stage are also available.
For applications under vacuum conditions, the Q-521 is also available in versions for 10-9 hPa.
The drive principle of the miniature stage is based on a piezomotor inertia drive. This makes the compact dimensions, high resolution and high velocity possible. Due to its ability to self-lock at rest, the piezomotor requires no power and produces no heat. It holds its position with a force of 1 N.
Controller and software
Position control of the Q-521 series is designed for fast point-to-point motion. This is performed by the E-871 motion controller and the control is addressed digitally via a USB or RS-232 interface and has numerous parameters for optional optimization of the settling behavior. Thanks to its network capability, it is possible to control up to 16 axes simultaneously via one computer interface. Fast startup and system configuration takes place via the PIMikroMove, which is included in the scope of supply. Implementation into existing environments is possible via LabVIEW drivers and DLLs.
The E-870 driver electronics are available for open-loop operation. It is also specially designed to meet the requirements of the piezo inertia drives. Serial control of a unit with up to four channels is possible from one amplifier, which keeps investment costs low.
Source: Physik Instrumente (PI) GmbH & Co. KG